Desktop SEM with EDX

Name and Model: Hitachi TM-1000

Contact Person: Antti J. Niskanen
antti.niskanen(at)tkk.fi +358-9-470-22319

Year of Manufacture: 2009

Year of Installation: 2009

General Technical Information:

Substrate size: 

5 mm - 30 mm

Allowed materials:

Nearly anything, including biological samples.

Forbidden materials:

Extremely dirty, sticky, oily, or wet samples

Desrcription of Use: Easy-to-use desktop SEM with tungsten source and BSE (backscattered electron) detector for quick inspection, student use etc. outside the cleanroom. Includes EDX for convenient elemental analysis of all elements above beryllium.

Key Features and Accessories: Computer controlled automated system with semi-automatic sample change and manual mechanical sample movement. High-resolution imaging with computer, elemental analysis with installed EDX. Extremely easy to use (with about 10 minute training), thus ideal for student use. No tilt/rotation control of sample, however. Sample does not usually require gold plating.

Key Specifications: • Magnification 10 000x
• Acceleration voltage 15 kV
• Electron source Tungsten filament
• Detector BSE (Backscattered electron)
• EDX detector Cooled semiconductor detector

Photograph:

Location: Micronova Nanofabrication Centre - Nanofab 4142 - Tietotie 3, 02150 Espoo

City: Espoo