UV-vis-NIR Ellipsometer

Organization: University of Oulu » Center of Microscopy and Nanotechnology

UVISEL-VASE Horiba Jobin-Yvon

Hannu Moilanen

2009

2009


Ellipsometer is used in measurement of the optical properties of surfaces and thin films. Also information about the thickness of the thin films can be obtained.

Versatile software for post-processing the ellipsometry data

Non-destructive method
Wavelength range: 190-2100 nm
Extremely thin layers can be measured (< 10 nm)

University of Oulu, Center of Microscopy and Nanotechnology, Cleanroom

Oulu

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