Scanning Electron Microscope

Organization: University of Eastern Finland » Department of Physics and Mathematics (Joensuu)

LEO 1550

Pertti Pääkkönen

1998

1998

Scanning electron microscope with nanometer scale resolution.

Imaging.

Field emission scanning electron microscope with 200 V – 30 kV beam energy, 20x to 900.000x magnification and 1 nm resolution at 20 kV.

Filament Schottky field emitter
Beam energy
200 V - 30 kV
Beam current
4 pA - 10 nA
Resolution
3 nm @ 1 kV
 1 nm @ 20 kV
Magnification
20x - 900.000x
Specimen chamber
330 mm
Stage
X: 125 mm
 Y: 100 mm
 Z: 55 mm
 Tilt: 0 - 90°
 Rotation: 360°
  

Joensuu

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