| Secondary electron image resolution | 1.0nm (at 15kV)
1.4nm (at 1kV, deceleration mode)
2.0nm (at 1kV, standard mode) |
| Backscattered electron image resolution | 3.0nm guaranteed (at 15kV YAG detector, option) |
| Electron optics | |
| Electron gun | Cold field emission electron source |
| Acc. voltage | 0.5 - 30kV (variable at 0.1kV/step) |
| Magnification | X 20 - X 800 000 |
| Objective aperture | 4 opening, selectable and alignable outside the vacuum (Heater built-in) |
| Detectors | Secondary electron detector (upper/lower/upper + lower),
(noise compensation using a beam monitor),
(signal control function)
Transmitted electron detector (optional)
Energy dispersive X-ray detector (optional) |
| Specimen stage | X: 0 ~ 110 mm
Y: 0 ~ 110mm
Z: 1.5 ~ 40mm
Tilt: -5 +70°
Rotation: 360° | |
| Drive: | PC controlled 5 axes motor drive | |
| Operation/display | PC/AT compatible, OS: Windows XP *
2 pcs of 19" Flat panel display |
| Scan mode | Normal, Split/dual mag./line scan, position
set, spot, AAF, SAA, oblique |
| Frame memory | 640 x 480 pixels, 1.280 x 960 pixels,
2.560 x 1.920 pixels, 5.120 x 3.840 pixels |
| Image processing | Image processing software, image filing software built-in |
| Image file format | BMP, TIFF, JPEG selectable |
| Scan speed | TV, slow (0.5 ~ 40 s/frame) for viewing
Slow (40 ~ 320 s/frame) for recording |
| Image processing | Automatic image brightness & contrast,
raster rotation, autofocus, auto-stigmation,
averaging, frame integration, color display |
| Auto data recording | Film numbering, acc. voltage, micron bar
with a scale, magnification, date, hours and
working distance |
| Electrical image shift | ±12µm (at W.D. = 8mm) |
| Vacuum system | Fully automated pneumatic valve control
Energy saving ECO mode
lon pumps 3 sets
TMP 1 set
RP 1 set |