Name and Model: Zeiss/Opton Axiospeed FT
Contact Person: Victor Ovchinnikov
Year of Manufacture: 1988
Year of Installation: 1998 (old), 2002 (new)
General Technical Information: System applies method of spectral analysis in reflected light
Desrcription of Use: Measuring of transparent silicon layers
Key Features and Accessories: Measuring is automatic and has a high speed
Key Specifications:
Thickness range 50 nm - 5 µm
Accuracy of thickness measurements < 2.5 %
Time of measurement 0.5 s/point
Spectrum range 380 - 750 nm
Analyzed layer number up to 3
Photograph:
Location: Micronova Nanofabrication Centre - cleanroom section F8. Tietotie 3, 02150 Espoo
City: Espoo
Additional information:
Booking: http://www.micronova.fi/booking
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