Field emission scanning electron microscope (FESEM)

Name and Model: Hitachi S-4800

Contact Person: Marianna Kemell

Year of Manufacture: 2004

Year of Installation: 2004

General Technical Information: High-resolution field emission scanning electron microscope.

Desrcription of Use: Scanning electron microscopy with secondary, backscattered and transmitted electrons.

Key Features and Accessories: Semi-in-lens configuration with two secondary electron detectors, one of which is equipped with an energy filter that enables composition contrast also at low acceleration voltages. Retarding field option for very low voltage imaging. Additional detectors: YAG BSE detector and bright field STEM detector. Max specimen diameter 10 cm. Tiltable, eucentric stage. Dry vacuum system.

Key Specifications: Acceleration voltages:                                                 0.5-30 kV
Best resolution for SE imaging:                                1.0 nm
Best resolution for BSE imaging with YAG BSE:   3.0 nm
Best resolution for BF-STEM imaging:                    1.5 nm

Photograph:

Location: University of Helsinki, Department of Chemistry, A.I.Virtasen aukio 1, 00560 Helsinki

City: Helsinki