Scanning Electron Microscope (SEM) and Energy Dispersive X-ray Spectrometer (EDS)

Organization: Teknologiakeskus KETEK Oy

Zeiss EVO 50VP (SEM), Röntec Quantax 3001 (EDS)

Jonne Näkki

2004

2004

 

  • Max resolution of SEM: 3,5 nm
  • Max magnification of SEM: 200 000x.
  • Detection limit of EDS:  Z > 6 (carbon), > 0,1 %.

With Scanning Electron Microscope (SEM) it is possible to examine surfaces with high magnification. The instrument is able to operate at low pressure level and thus it is possible to examine and analyse non-conductive sample surfaces without conductive gold or carbon coating on the surface.

Electron bombardment of sample surface in SEM makes sample atoms to emit X-rays. This X-ray spectra can be detected with Energy dispersive (EDS) analyser that is attached to the SEM.

EDS is able to detect elements that have atomic number 6 (carbon) or higher with a detection limit of 0, 1%. The instrument is also able perform quantitative analyses. The instrument is liquid nitrogen free with operating temperature of -25°C.

 

Technology Centre KETEK Ltd

Kokkola

Powered by Evianet Solutions Oy