Laser diffractometer

Organization: MIKES Centre for Metrology

Laser diffractometer

Virpi Korpelainen
virpi.korpelainen@mikes.fi 010-6054412 

Accurate Littrow configuration laser diffractometer with 532 nm Nd:YAG laser.

Characterization of grating pitch

Calibration of 1D and 2D grids, which can be used in calibration of microscope scales and orthogonalities of the scales.

Grating pitch characterization from ~300 nm to ~10 µm.

Uncertainties from 10 pm to subnanometre (depends on pitch and quality of the sample).

Mittatekniikan keskus (MIKES)
Tekniikantie 1
02151 Espoo

Espoo

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