Name and Model: Carbolite CTF/12/65/55
Contact Person: Antti Nuottajärvi nuanka@jyu.fi
Year of Manufacture: 1996
Year of Installation: 1996
General Technical Information: Circular tube furnace with 2 inch ceramic tube. Heated length 540mm.
Desrcription of Use:
Used to oxidise Silicon substrates
Key Features and Accessories: Ar, O2 and N2 gases. No vacuum. Eurotherm 3216 PID controller.
Key Specifications: Max. temp 1100 degC. Ramp rate and heating/cooling in steps can be programmed to go automatically or all can be done manually.
Photograph:
Location: University of Jyväskylä, Nanoscience Center, Cleanroom Survontie 9, 40500 Jyväskylä
City: Jyväskylä
Additional information:
Booking:
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