Rutherford Backscattering Spectrometry (RBS)

Name and Model:

Contact Person: Timo Sajavaara
timo.sajavaara(at)jyu.fi

Year of Manufacture:

Year of Installation:

General Technical Information:

• He and H beams possible
• Energy range 0.2-5 MeV for He (0.2-3.4 for H)
• Three axis goniometer, target holder can host 20 samples
• Channelling measurements possible

Desrcription of Use: In RBS light ions are directed to the sample to be analyzed and scattered ion energy is measured in the backscattering geometry.

Key Features and Accessories:

• Quantitative information on sample elements, film thicknesses and crystallinity
• Sensitive down to ppm level for heavy elements on light substrate
• Poor sensitivity for elements lighter than the substrate

Key Specifications:

Photograph:

Location: Accelerator Laboratory, Pelletron facility

City: Jyväskylä