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Thermal Annealing

  • 1. Nanofabrication
  • 1.6. Structural Modification
  • 1.6.1. Ion Implantation
  • 1.6.2. Diffusion
  • 1.6.3. Thermal Annealing
    • Instruments
    RTA Furnace - University of Oulu
    X-ray Photoelectron Spectrometer (XPS) - Tampere University of Technology

    Expertise
    Porous silicon - University of Eastern Finland
    Thin Films and Other Nanostructured Materials - University of Helsinki
  • 1.6.4. Particle Beam Irradiation
  • 1.6.5. Other Structural Modification
  • 2. Characterization
  • 3. Computation, Modeling and Simulation
  • 4. Other
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