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» Capability Classification
Other Device Fabrication
1. Nanofabrication
1.11. Device Fabrication
1.11.1. Nanoelectronic Devices
1.11.2. Nanophotonic Devices
1.11.3. Nanofluidics
1.11.4. Other Device Fabrication
Instruments
Focused Ion Beam (FIB) System - University of Oulu
Photolithography mask patterning device - University of Oulu
Wire/Ribbon Bonder - University of Oulu
Expertise
Nanoprecision positioning systems with laser interferometric feedback - ACWACO Ltd.
2. Characterization
3. Computation, Modeling and Simulation
4. Other
MIKTECH OY - Graanintie 5, 50190 Mikkeli FINLAND
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