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Rutherford Backscattering Spectrometry (RBS)

  • 1. Nanofabrication
  • 2. Characterization
  • 2.4. Elemental analysis
  • 2.4.1. Electron Spectroscopy (XPS/ESCA, AES, SAM)
  • 2.4.2. X-ray Analysis (EDS/EDX, WDX, XRF)
  • 2.4.3. Optical Spectroscopy (LIPS, ICP-OES)
  • 2.4.4. Mass Spectrometry (SIMS, ICP-MS, LA-ICP-MS, TOF)
  • 2.4.5. Rutherford Backscattering Spectrometry (RBS)
    • Instruments
    Rutherford Backscattering Spectrometry (RBS) - University of Jyväskylä

  • 2.4.6. Elastic Recoil Detection (ERDA, HFS)
  • 2.4.7. Inelastic Neutron Scattering (INS)
  • 2.4.8. Deep Level Spectroscopy (DLS, DLTS)
  • 2.4.9. Other Elemental analysis
  • 3. Computation, Modeling and Simulation
  • 4. Other
MIKTECH OY - Graanintie 5, 50190 Mikkeli FINLAND
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