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» Capability Classification
Etching
1. Nanofabrication
1.1. Nanolithography and Direct Patterning
1.2. Thin film Deposition and Growth
1.3. Self-Assembly and Self-organization
1.4. Etching
1.4.1. Reactive Ion Etching (RIE, DRIE)
1.4.2. Plasma Etching
1.4.3. Ion Beam Milling and Electron Beam Assisted Etching
1.4.4. Wet Etching
1.4.5. Laser Ablation
1.4.6. Electrochemical Etching
1.4.7. Other Etching
1.5. Surface Modification
1.6. Structural Modification
1.7. Nanowire and Tube Synthesis
1.8. Nanoparticle Synthesis
1.9. Molecular Fabrication and Synthesis
1.10. Biological and Cellular Tools
1.11. Device Fabrication
2. Characterization
3. Computation, Modeling and Simulation
4. Other
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