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Electron Beam Lithography (EBL)

  • 1. Nanofabrication
  • 1.1. Nanolithography and Direct Patterning
  • 1.1.1. Photolithography
  • 1.1.2. Electron Beam Lithography (EBL)
    • Instruments
    E-beam Lithography Tool / SEM - University of Jyväskylä
    E-beam Lithography Tool / SEM - University of Jyväskylä
    Electron Beam Lithography - University of Eastern Finland
    Electron Beam Microscope/Electron Beam Lithography System - Aalto University School of Science and Technology (TKK)
    Scanning Electron Microscope - Aalto University School of Science and Technology (TKK)
    Scanning electron microscope + e-beam lithography system - Savonia University of Applied Sciences

  • 1.1.3. Nanoimprint Lithography (NIL)
  • 1.1.4. Laser Interference Lithography (LIL)
  • 1.1.5. Near Field Holography (NFH)
  • 1.1.6. Micro Contact Printing
  • 1.1.7. Focused Ion Beam Milling
  • 1.1.8. Ion/Electron Beam Assisted Vapor Deposition
  • 1.1.9. Dip Pen Nanolithography
  • 1.1.10. Other Nanolithography and Direct Patterning
  • 2. Characterization
  • 3. Computation, Modeling and Simulation
  • 4. Other
MIKTECH OY - Graanintie 5, 50190 Mikkeli FINLAND
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